Tom's Hardware · 1 min read

China startup demoes prototype EUV light source

 China startup demoes prototype EUV light source

Chinese startup Langdao Silex showcased its laser-produced plasma EUV source at a trade show, but the technology will likely take many years before it gets to decent EUV power levels. Even if it does, China will need many more advancements to build a practical EUV lithography tool.

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